Process tool inspects probe cards
For the optical inspection of probe cards, NanoFocus has launched the measuring system µsprint hp-opc 3000.
It is designed for the inspection of probe cards, which are special test devices used for standard function tests of wafers. Since wafer testing can only take place after the functional structures on a wafer are fully manufactured, damage of wafers during testing represents a significant economic loss.
The measuring system ensures that the wafers are in sound condition after testing. It consequently contributes to reducing operational costs, says the company, minimising yield losses as well as increasing quality in wafer production.
The tool has potential for wafer test locations with large-volume throughput and for the manufacturing process of probe cards, says the company, with a successful pilot system installed at a manufacturer of semiconductor elements.