Advanced Energy bases Luxtron converter on temperature extremes
Distinguished by its wide temperature sensing range, the five-channel Luxtron FluorOptic thermometry (FOT) converter is suitable for plasma-enhanced semiconductor deposition and etch fabrication processes, said Advanced Energy Industries.
The multi-channel Luxtron M-1100 operates from -200 degrees C, the start of the cryogenic range, to ‘hot chuck’ temperatures of +450 degrees C. According to Advanced Energy, it has industry-leading accuracy of +/- 0.1 degrees C and stability of +/- 0.05 degrees C. The integration of five channels supports the monitoring of multiple probes from a single converter, and the converter’s flexible communication outputs simplify digital monitoring, updates and system integration.
“Accurate monitoring across extended temperature ranges is critical as semiconductor manufacturers look to meet the complex etch and deposition requirements of next-generation fabrication processes,” said Dhaval Dhayatkar, vice president and general manager of critical sensing and control products at Advanced Energy. “The Luxtron M-1100 . . . meets customer demands to minimise measurement overheads and provide integration into monitoring and control systems.”
The Luxtron FOT sensing systems use Advanced’s fibre optic probes with phosphor sensor technology, combining converters with a light source, a photodetector proprietary software algorithm and low-noise amplification circuitry. The Luxtron M-1100 is believed to be the first model to offer both analogue and EtherCAT communication interfaces.
The new converter simplifies implementation by enabling wall-mounting on the side of the system being monitored. There is also support from Advanced Energy’s global engineering teams, which collaborate with OEMs to develop custom probes for leading edge applications.
The Luxtron M-1100 will be on display at Advanced Energy’s booth (960) at Semicon West 2023 (Moscone Center, San Francisco, California, USA from 11 to 13 July).
Advanced Energy Industries designs and manufactures precision power conversion, measurement and control solutions for mission-critical applications and processes.
Advanced Energy’s power range meets complex applications in a range of industries including semiconductor equipment, industrial production, medical and life sciences, data centre computing, networking and telecommunications.
The company is headquartered in Denver, Colorado, USA.
